Design of circular piezoelectric actuator for the micro adaptive mirrors

This paper presents the numerical modeling of a piezoelectric actuator. The vibro-elastic piezoelectric actuator has the layered structures. Applying the equivalent parameters based on the plate/shell theories to the multilayered structures, it is possible to investigate the geometric and material characteristics of multilayered systems and estimate their structural performances. And the optimization designs for the geometric dimensions or material properties of multilayered systems on the layered model can easily be achieved.