State space equations and simulation of MEMS electrostatic actuator to equivalent circuit

The rapid advancement of Micro-Electro-Mechanical Systems (MEMS) technology has led to the development of various types of actuators with diverse applications. This paper presents a comprehensive study on the state space equations and simulation of MEMS electrostatic actuators using an equivalent circuit model. The key objectives include introducing MEMS electrostatic actuators, developing a simplified equivalent circuit model, deriving mathematical modeling of the equivalent circuit, and conducting simulations of LR and LRC circuits as well as the equation of motion in MATLAB. We followed applied mathematical method using Matlab. The results demonstrate the practicality and accuracy of the proposed modeling and simulation techniques. The insights gained from this study hold significant potential for enhancing the design and performance optimization of MEMS electrostatic actuators in various engineering applications.